A MicroElectroMechanical Digital-to-Analog Converter (MEMDAC) converts an input binary code into an output displacement proportional to the analog value given by the input code. We present a MEMDAC with improved kinematic design that allows large in-plane displacement range and high positioning resolution while making microfabrication process less critical. A 12-bit MEMDAC is successfully fabricated and operated demonstrating a positioning resolution better than 3nm and a total stroke of 8.57μm at a driving voltage of 45V. These features make it an attractive candidate for diverse applications in which open-loop positioning with high resolution, stability and repeatability are beneficial.
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