2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage

摘要

This paper presents a novel 2D electro-thermal microgripper based on integrated silicon-polymer laterally stacked forward actuators. Displacements up to 8 and 13 µm along x-axis and y-axis at 2 V are measured. The microgripper is capable of rotating the clamped object both clockwise and counter-clockwise. Maximum average working temperature is 160 °C.