Two decades of MEMS -- from surprise to enterprise -

摘要

This paper gives a brief overview of MEMS research and commercialization in the past two decades, its present status, and future prospects. The historical development of MEMS technology is followed in relation to devices enabled by developed technology. For the present status, the importance of MEMS design and fabrication infrastructures is discussed in order to help more MEMS products to be successful in high-end market. Two future trends in low cost fabrication, nano miniaturization, and system integration of heterogeneous functional elements are observed.