Evaluating quasi-self-sensing piezoelectric actuator by using an innovative laser doppler interferometer

摘要

A high precision quasi-self-sensing piezoelectric stack actuator was developed as a tested for low cost piezoelectric actuator development. To verify the performance of the piezoelectric actuator, a newly developed Doppler interferometer with structure-testing ready facility was also implemented. Detail configurations that form the basis of the piezoelectric actuator as well as the structure scanning system of this interferometer were revealed. Experimented data obtained clearly demonstrated the advantages of the proposed piezoelectric actuator configuration.