A novel technique, which can introduce compressive residual stress into surface of materials by using cavitation impacts, was proposed. The region and intensity of cavitation impacts were controlled by a submerged cavitating water jet. In the present paper, residual stress of several materials was measured by means of an X-ray diffraction method, before and after peening by a cavitating water jet. Tested materials were tool alloy steel SKD61, silicon manganese steel SUP7, stainless steel SUS304 & SUS316, carbon steel S45C, copper alloy H3100 and copper C1100. Maximum and minimum principal stresses were measured changing with a scanning speed of the specimen. Compressive residual stress was introduced into all tested materials by the impacts of a cavitating water jet. It can be concluded that the cavitation impacts can use for peening as "shot-less peening" instead of shot peening.
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