Differential transresistance amplifier for noise performance optimisation in piezoresistive sensors

摘要

Many piezoresistive devices, based on the conversion of mechanical to electrical energy, lack sensitivity, linearity or cost-effectiveness. Sensitivity is often sacrificed to reduce thermal effects. In this paper we describe a low cost pressure sensor, based on the technology of metal strain gauges, in which the sensitivity is easily increased by the particular arrangement and circuit topology. Furthermore the piezoresistor noise, generated by temperature fluctuation, can be drastically reduced. Preliminary simulated results suggest that a similar approach is also possible in order to design low noise piezoresistive sensors integrated on silicon wafer.