Structure-property relationships for nano-porous poly(methyl-silsesquioxane) films with low-dielectric constants prepared via organic/inorganic polymer hybrids

摘要

We present here results on a technique of incorporating air-voids into poly(methyl-silsesquioxane) (PMSSQ) for obtaining porous material with lower dielectric constant. By thermal decomposition of star-shaped hydroxy-terminated poly(carpolactone) (PCL) from a PCL/PMSSQ polymer hybrids, nanometer-scaled pores are introduced in PMSSQ whose dielectric constants show a continuous decrease with higher PCL compositions. Data from DMA, FTIR, TEM and TGA experiments for investigating the poregenerating process are reported.