Two types of diamond4ike carbon (DLC) films with different microstructures were prepared by unbalanced magnetron sputtering, and the tribological properties of the nanoscaled DLC multilayer coatings consisting of alternating layers of graphite-like and amorphous-like microstructures were examined. The DLC microstructure was characterized by certain features of graphite-like clusters, in that some of them had onion-like structures. The films filled with the clusters were obtained in a condition with an incidence of high influx of energetic electrons, and the other films without apparent cluster structures were formed in a condition with ion bombardment controlled by negative bias voltage applied to substrates. Stacking each film layer-by-layer, the nanoscaled multilayered coatings showed superior tribological properties to individual single-layered films due to the combination of properties induced by the difference of microstructures.
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