SYNTHESIS OF ADVANCED COMPOSITE OXIDES THIN FILMS BY THE LIQUID PHASE DEPOSITION METHOD FROM AQUEOUS SOLUTION

摘要

A new wet process has been developed for the synthesis of various kinds of oxide thin films on various kinds of substrates, even which have complex surface morphology, from aqueous solution. The process was named as the LPD, Liquid Phase Deposition, method, which has some advantages over the conventional dry processes. This process can be applied to an on-she synthesis of advanced materials in the thin film technology. In this paper, some current topics on the synthesis of the composite thin oxide films by the LPD method, are presented.