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Investigation of laser produced x-ray plasma created from high pressure gas -puff target using Nd:YAG laser

机译：使用Nd：YAG激光器从高压气体-Puck靶产生激光产生的X射线等离子体的研究

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We characterize a laser produced gas puff plasma for soft x-ray generation. Strong emission in 11.4 nm wavelength region was observed, using krypton and xenon gas puff targets irradiated by a Nd:YAG laser with an energy of 0.7J/8ns. Space resolved x-ray spectral measurement indicated that the source size on the Rayleigth length and the gas density profile.

机译：我们表征了激光产生的气体粉扑等离子体，用于软X射线产生。使用由Nd：YAG激光照射的氪和氙气粉末靶标，观察到11.4nm波长区域的强发射。能量为0.7J / 8ns。空间已分辨X射线光谱测量表明，瑞利格长度和气体密度谱上的源极尺寸。

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《Symposium on advanced photon research 》|2000年||共4页
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Andrzej Bartnik; Henryk Fiedorowicz; Japan Atomic Energy Research Institute;
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中图分类光子与规范粒子交子、引力子入此。 ;
关键词
Laser produced plasma X-ray source; EUV lithography; Gas puff target; X-ray generation;

机译：激光产生的等离子体X射线源;EUV光刻;气体浮气靶;X射线生成;

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专利

1. Investigation of soft X-ray emission from a gas puff target irradiated with a Nd:YAG laser [J] . Henryk Fiedorowicz, Andrzej Bartnik, Miroslaw Szczurek Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter . 1999 ,第1a3期

机译：用Nd：YAG激光辐照从气扑目标发出的软X射线的研究
2. Investigation of soft X-ray emission from a gas puff target irradiated with a Nd:YAG laser [J] . Fiedorowicz Henryk, Szczurek Miroslaw, Daido Hiroyuki, Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter . 1999 ,第1期

机译：用Nd：YAG激光辐照从气扑目标发射的软X射线的研究
3. Investigations on femtosecond-pulse-driven soft X-ray lasers using a gas puff target irradiated with a Ti:Sapphire laser [J] . H. Fiedorowicz, A. Bartnik, M. Szczurek, Journal de Physique, IV: Proceedings of International Conference . 2001 ,第2期

机译：飞秒脉冲驱动的软X射线激光器的研究，该激光器使用的是由Ti：Sapphire激光器照射的气团靶
4. Investigation of laser produced x-ray plasma created from high pressure gas -puff target using Nd:YAG laser [C] . Andrzej Bartnik, Henryk Fiedorowicz, Japan Atomic Energy Research Institute Symposium on advanced photon research . 2000

机译：使用Nd：YAG激光器从高压气体-Puck靶产生激光产生的X射线等离子体的研究
5. Spectral analysis of solid and gas target laser-produced plasma water-window sources. [D] . Crank, Matthew Ling. 2012

机译：固体和气体目标激光产生的等离子体水窗口源的光谱分析。
6. Properties of laser-produced GaAs plasmas measured from highly resolved X-ray line shapes and ratios [O] . J.F. Seely, J. Fein, M. Manuel, -1

机译：根据高度分辨的X射线线的形状和比率测量的激光产生的GaAs等离子体的特性
7. Characterization of Laser-Produced Plasmas from High Pressure Gas-Puff Using Space Resolved X-Ray Spectroscopy. [O] . Masayuki SUZUKI, Hiroyuki DAIDO, Noriyuki SAKAYA, 1999

机译：使用空间分辨X射线光谱法表征激光产生的等离子体从高压气泡粉末。
8. Investigations on Soft X-Ray Lasers with a Picosecond-Laser-Irradiated Gas Puff Target [R] . Fiedorowicz, H., Bartnik, A., Jarocki, R. 2002

机译：用皮秒激光辐照气体靶法研究软X射线激光器

Investigation of laser produced x-ray plasma created from high pressure gas -puff target using Nd:YAG laser

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