Temperature dependence study of SWNT growth using Pt catalyst in Alcohol Gas Source Method in High Vacuum

摘要

Carbon nanotubes (CNTs) have been anticipated for application in a lot of future nanodevices. To fabricate CNT devices in a conventional LSI process, it is desirable to grow CNTs at low temperature under high vacuum. So far, we reported that, by using the Pt catalysts, single-walled carbon nanotubes (SWNTs) could be grown at 700°C under an ethanol pressure of 10~(-4) Pa, while keeping the yield comparable with that grown with Co catalyst at 10~(-1) Pa [1]. In this study, we investigated the growth conditions of the SWNT growth with Pt catalyst, and demonstrated that SWNTs could be grown even at 500°C.