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Can You Reduce the Amount of CDs Measured, While Retaining the Required Sensitivity of Statistical Process Control (SPC)?

机译：您是否可以减少测量的CD量，同时保留统计过程控制所需的敏感性（SPC）？

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《IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop》|2006年||共5页
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Eidelman A.; Asscher J.;
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中图分类 TN305-53;
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4. Can You Reduce the Amount of CDs Measured, While Retaining the Required Sensitivity of Statistical Process Control (SPC)? [C] . Eidelman, A., Asscher, . 2006

机译：您可以在保持所需的统计过程控制（SPC）敏感性的同时减少CD的测量数量吗？
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