Extending laser cleaning techniques ofsurfaces to the sub-micron region by using nonlinear saw pulses

摘要

The removal of micron sized particles rom the surface of a solid with nnaosecond surface acoustic wave (SAW) pulses was investigated. Both normal and tangential particle displacements have been studied. It is shown that the nonlinear transformation of the excited SAW pulses results in an increase of the surface acceleration and contributes to the cleaning process extending it to even smaller particle dimensions than for linear pulses. The echnique is applicable in vacuum and improves the energetic effectiveness of the cleaning due to removal of particles not only in the irradiated region, but also in the wider area covered y the SAW pulse propagaton.