Feedforward controller based-on piezoelectric actuator's hysteresis model and its performance simulation of an XY plane motion stage

摘要

The piezoelectric actuator is a prefect nano-positioning drive element for its good performance except its hysteresis, creep, and nonlinearity, which make its control difficult. This paper proposed a control design methodology based on piezoelectric actuator's hysteresis model. First system identifying experiments were performed to identify the system model of a XY serial kinematics plane nanopositioning stage employing piezoelectric actuators. The hysteresis model was fitted with cubic fitting method for voltage-increasing stage and quadratic curve fitting method for voltage-descend curve. Based on the identified model, a feedforward iterative learning controller, ILC, was designed based on an inverse plant model. Finally the performance of the stage with ILC was simulated in MATLAB to verify the controller performance. The research in this paper provides an effective approach for open loop controller design and implement.