A study of smooth surface finish by ELID-lap grinding and metal-resin bonded wheel

摘要

As the high-tech devices supporting the current information-oriented age grow increasingly high performance and compact over the recent years, demands are also growing stronger for better surface finish and higher accuracy in the optical and electrical parts which make up these devices. To answer to such needs, the authors have proposed ELID lap grinding, which is a constant pressure grinding method employing the ELID technique, and are carrying out studies to realize efficient and highly accurate machining. To upgrade the surface roughness of the workpieces ground, the authors propose a grinding method, in which the workpiece is ground together with a harder material. In this study, to improve the grinding quality of silicon, cemented carbide was used as the harder material and the grinding characteristics were studied. When silicon was ground together with cemented carbide, surface roughness improved compared to when ground alone, but the removal rate was lower, and more or less the same as that of the cemented carbide. The experimental results confirmed that this method is useful for obtaining better surface qualities.