The Influence of Thermal Expansion of the Cutting Tool during Ultraprecision Diamond Turning of Electroless Nickel on the Accuracy of the Workpiece and a Simple Method of Correction

摘要

Form deviation of micromachined workpieces is influenced by many factors. Especially thermal expansion of the tool due to the heat caused by cutting with a temperature gradient from the cutting edge to the toolholder and in addition the non-ideal cutting conditions in the centre result in remarkable deformation of faced electroless nickel parts with p-v values between 0,2μm and 0,4μm. As metrological applications demand a flatness deviation as small as possible there became a requirement for a method of correction. By programming an inverse contourline using characteristic points taken from an already measured profile, surfaces with a flatness smaller than 0,1 μm were attained without much effort.