Intelligent Ceramics Made from Structural and Functional Ceramics

摘要

Structural ceramics have many useful properties such as high melting point, excellent corrosion resistance and good wear resistance. Structural ceramics however have not been widely used for engineering fields, because its reliability is low. We are trying to give structural ceramics various function by composing structural ceramics and functional ceramics in order to prevent over load. Here we prepared highly c-axis AlN thin film on the polycrystalline substrate such as Al_2O_3 and Si_3N_4. This film showed piezoelectricity. Also we prepared ZnS film doped with Mn on the glass. This film showed stress inducement luminescence. It is made clear that these AlN and ZnS films can give the structural ceramics stress sensing function.