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Characterization of the Nb~+ Implanted Sapphire after Annealing in Reducing Atmosphere

机译:减少气氛退火后Nb〜+植入蓝宝石的表征

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Sapphire crystals were implanted with 380 keV Nb~+ ion to a dose of 5 x 10~(16) ions/cm~2. The behaviors of the radiation damage produced by ion implantation followed by annealing with a series of steps from 500 to 1100°C at reducing atmosphere were investigated using optical absorption, and XPS measurements. It has been found that the implanted niobium in sapphire is in different local environments with different charge states after annealing. The results of optical density (OD) from the bands based on the well known F-type centers with annealing temperature and time show that the annealing behaviours of the radiation damage can be divided into different stages due to different mechanisms.
机译:将蓝宝石晶体植入380keV Nb〜+离子,含有5×10〜(16)离子/ cm〜2的剂量。使用光学吸收研究了通过离子注入产生的辐射损伤的辐射损伤的行为,然后用从500至1100℃的一系列降低气氛进行退火,并进行XPS测量。已经发现,蓝宝石的植入铌是在退火后具有不同电荷状态的不同局部环境。基于众所周知的F型中心的带有退火温度和时间的带的光密度(OD)结果表明,由于不同的机制,辐射损伤的退火行为可分为不同的阶段。

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