Advanced Package FA flow for next-gen packaging technology using EOTPR, 3DXRAY Plasma FIB

摘要

Within this paper, the authors present an adapted FA flow for state-of-the-art Package Failure Analysis for 20nm technology and below. As a key aspect, three methods (EOTPR, 3D Xray & PFIB) are introduced as the next-gen FA standard methods for emerging package technologies such as TSV, u-pillar bumping and stacked-die devices. By showing different types of daily Package FA requests, the paper compares & discusses important factors such as turn-around-time (TAT), success yield and results quality. In the end, an outlook is given how recent developments on these techniques will help to establish a new standard FA flow.