Characterization of thin layers by X-ray reflectometry

摘要

The paper presents an application of the grazing incidence X-ray reflectivity method for rapid nondestructive characterization of thin films and interfaces, independently on the amorphous or crystalline structure. The total thickness of multilayer can be determined from the period of interference fringes (Kiessig's fringes) and superlattice period from the positions of Bragg peaks.