AN EVALUATION OF THE EFFECTIVENESS OF AIR SHOWERS ON REMOVING PARTICLES FROM CLEANROOM GARMENTS

摘要

The air shower controversy has plagued the design and operation of cleanrooms for many years. This paper presents substantial data from previously unpublished works and from experiments designed to measure airborne particulate levels inside air showers and the effect of air showers on the particle levels on cleanroom garments. Both clean and dirty garments were tested in two separate air showers, using two separate techniques to evaluate the cleanliness of the test garments.