ACID GAS TESTS OF GASEOUS CONTAMINANT ADSORBERS

摘要

Acid gas contamination in cleanrooms may affect product quality. Adsorbers are available for controlling acid gases from outside air. Full-scale tests of air cleaners at reasonable test concentrations are needed to assess the performance of adsorbers, but no standardized test method is presently available. Small and full-scale tests using acid gas contaminants were developed and applied to three media and several full-scale gaseous contaminant air cleaners. The test contaminants were sulfur dioxide, nitrogen dioxide, and ozone, tested alone and in combination with a 5 component VOC mixture. The acid gases were tested at approximately the ambient air quality standard concentrations (50 to 140 ppb). When used, the VOCs were at about 1 ppm total concentration. The media tested included carbon, impregnated carbon, and potassium permanganate impregnated alumina. Filter performance data are presented as examples and the test methods are evaluated. The test methods were found to be suitable for use as constant concentration challenge methods and to provide consistent and useful performance data.