A MEMS electron impact ion source integrated in a micro-time-of-flight mass spectrometer

摘要

This electron impact ion source has been fabricated using the MEMS technology. The chosen process is fully compatible with the reflectron's fabrication so that the ion source could be integrated into a micro-Time-Of-Flight mass spectrometer used for gas analysis. The fabrication process and its performances are reported. The current generated could be as high as tens of nano-amps, one of the highest reported for an integrated source in a micro mass spectrometer. It presents a raw ionization efficiency of 2,5.10~(-3).