Sensor of Carbon Dioxide Based on MIS Structure with Solid Electrolyte Layer

摘要

We present the first results on CO2 gas detection with the help of sensors based on metal-polymer electrolyte-isolator-semiconductor structure with additional layer of proton conducting solid electrolyte-ether of phenylsulphonic acid and polyvinyl alcohol. The sensor operates at room temperature. The detection limit is shown to be of about 100 ppm of CO2in air.