THREE DIMENSIONAL PROFILE MEASUREMENT OF FOUR-STEP REFERENCE SPECIMENS USING THE FRINGE SCANNING FOURIER TRANSFORM METHOD

摘要

A new method of three-dimensional profile measurement of four-step reference specimens is presented. Instead of measuring only the height difference between central points of the two neighbouring surfaces of the specimen, overall profile of the whole specimen can be measured by using the fringe scanning Fourier transform method. The method to determine step height from its surface profile is proposed.