THERMO-OXIDATIVE DEGRADATION OF FLUOROHYDROCARBON PLASMA POLYMER LAYERS

摘要

Three types of plasma polymer layers with different F/C ratios ranging from 0 to 2 were repeatedly heated to 200°C in air. After each heating cycle the mass loss was determined and the evolution of water contact angle, infrared spectra, and XPS data were follow. The mass loss rate was found to be similar for all layers (50 % after 10 - 20 h). The oxygen uptake was faster for layers with lower fluorine concentration. After a number of heating cycles the adhesion to the glass substrate diminishes upon exposure to water. Before this point the highly fluorinated layer has a stable contact angle of 118° while the water contact angle of the other layers decreases continuously.