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AN IMPROVED METHOD FOR THE STUDY OF NEUTRAL SPECIES PRODUCED IN PROCESSING PLASMAS

机译:加工等离子体中产生中性物种研究的改进方法

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Neutral, electronegative particles, including radicals, produced in a processing plasma may be studied by using a mass spectrometer to examine the negative ions formed from them in the source of the mass spectrometer. The technique has advantages over the more usual technique of examining positive ion formation from sampled neutral species. Experimental data for a carbon dioxide plasma are shown to illustrate the method.
机译:通过使用质谱仪来研究在处理等离子体中产生的中性,包括基团的电气给药颗粒,以检查由它们形成的负极离子在质谱仪的源极中。该技术具有优于从采样中性物质检查正离子形成的更常规技术。示出了二氧化碳等离子体的实验数据来说明该方法。

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