A Novel Solid State Pulsed Power Module for Excimer Laser

摘要

The design of solid state pulsed power modules for excimer lasers have been long-established over many years. The primary switch is normally a high power IGBT, a step up transformer, and two or three pulse compression stages. To overcome the problems of resetting and cooling of the pulse compressions stages, a novel design for a pulsed power module with extremely high repetition rates (10 kHz) and low energy (2 mJ) is proposed. The pump energy for the laser tube is switched by a stack of semiconductor switches without step up transformer or pulse compression. The principal design, simulation results, and first measurements are shown.