Surface measurement of optical cylinder using multiaperture overlap-scanning technique (MAOST)

摘要

Multiaperture overlap-scanning technique (MAOST) has been successfully used to measure larger optical flat with a smaller reference flat. This paper extends the technique to measure an optical cylinder. Utilizing the information in overlap area between subapertures. MAOST connects them to one aperture called full aperture. With the technique, half a cylinder or even a whole cylinder can be accurately measured. In the paper, the fundamental is discussed, mathematical model is given and connection results of 2 interferograms and 17 interferograms are shown. Results indicate that the error in principle of the method is about the order of 10~(-8) λ.