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Amorphous silicon thin film photodetectors with high sensitivity and selectivity in the ultraviolet spectrum

机译:非晶硅薄膜光电探测器具有高灵敏度和选择性紫外线谱

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A new family of photodetectors based on hydrogenated amorphous silicon (a-Si:H) and silicon carbide (a-SiC:H) is described. They are p-i-n photodiodes whose thin layers are grown by glow discharge on cheap substrates as glass or flexible materials. Modulating the absorption profile in the semiconductor and the thickness of the layers, it is possible to select, during the growing process, the wavelength range where the photodetector is more sensitive. A first generation prototype of photodetectors optimized for UV detection was tested at room temperature and with no external bias voltage, illuminating it with visible and vacuum-UV radiation. The results show that the measured quantum efficiency is above 15% in the 58.4 - 250 nm spectral range and about 300 times lower at longer wavelengths (0.05% at 700 nm). An improved second generation has been also tested in the same experimental conditions and the preliminary data exhibit a better noise level (less than 1 pA), a higher response stability and an enhanced efficiency. A linear dependence on the radiation intensity has been verified over three orders of magnitude at 400 nm. Noise figure evaluation and response times will be also presented.
机译:描述了基于氢化非晶硅(A-Si:H)和碳化硅(A-SiC:H)的新的光电探测器。它们是P-I-N光电二极管,其薄层通过闪光放电在廉价基板上作为玻璃或柔性材料而生长。调制半导体中的吸收曲线和层的厚度,可以在生长过程中选择光电探测器更敏感的波长范围。在室温下测试针对UV检测优化的光电探测器的第一代原型,没有外部偏置电压,用可见和真空-UV辐射照亮它。结果表明,测量的量子效率在58.4-250nm光谱范围内高于15%,在较长波长(0.05nm处为700nm)的约300倍。在相同的实验条件下也测试了改进的第二代,并且初步数据表现出更好的噪声水平(小于1Pa),更高的响应稳定性和提高效率。对辐射强度的线性依赖性已经在400nm的三个数量级上验证。还将提出噪声数字评估和响应时间。

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