CHEMICAL INTERACTIONS IN METAL-ION IMPLANTED FUSED SILICA

摘要

In the field of ion implantation large interest has grown onto chemical modifications induced in a target by chemically reactive ions. Results will be reported on silica implanted with titanium, tungsten, chromium and platinum ions. Compound formation have been found to depend on the reactivity of the host vitreous matrix as well as on the implanted metallic species and concentration. Amorphous silicide nanoclusters are formed for high-dose implantation of titanium and chromium.