In this paper, data of single layers of YbF$-3$/, BaF$-2$/, YF$-3$/, and NaF and multilayer coatings produced by conventional thermal evaporation (boat, e- beam) and ion assisted deposition (IAD) are compared. Hydrogen concentration depth profiling was performed using nuclear reaction analysis based on the reaction $+1$/H($+15$/N, $alpha$gamma@)$+12$/C. Absorption was measured with the aid of a laser calorimeter and a cw CO$-2$/ laser. A computer-controlled test facility with a TEA CO$-2$/ laser was used for determining the 1-on-1 damage thresholds of the coatings. The results point out that the absorption and damage behavior of coatings for the CO$-2$/ laser wavelength are related to the total amount of species containing hydrogen. Most of the IAD coatings exhibit a lower hydrogen contamination than conventional thin films.
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