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IR bolometer arrays: the route to uncooled affordable thermal imaging

机译:ir钻头阵列:加工的途径是不经济实惠的热成像

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Large arrays of bolometer elements have considerable potential for thermal imaging applications, offering uncooled operation, and a performance which challenges the cooled semiconductor detectors. A hybrid array technology, exploiting ferroelectric materials, is the basis of a successful range of linear and 2-D arrays. The success is based on hot-pressed ceramics (operating in both pyroelectric and dielectric modes), and the technologies for solder bump bonding and element reticulation. Arrays are increasing in size, from 10$+4$/ elements up to 10$+5$/ elements while the pitch is reducing, thus providing high resolution in compact systems. Ferroelectric thin films have recently shown marked improvement in the merit figures and, if compatible with the silicon IC, will allow a more direct array fabrication. These integrated array technologies have potential for high yield and low cost in very large area devices.
机译:大阵列元素元素具有相当大的热成像应用的潜力,提供了不良操作,以及挑战冷却的半导体探测器的性能。一种利用铁电材料的混合阵列技术,是成功的线性和2-D阵列的基础。成功基于热压陶瓷(以热电和介电模式运行),以及焊料凸块键合和元件网状件的技术。阵列的尺寸越来越大,来自10美元+ 4美元/元素,高达10美元+ 5美元/元素,而音调正在减少,从而在紧凑型系统中提供高分辨率。铁电薄膜最近在优点图中示出了显着的改善,如果与硅IC兼容,则允许更直接的阵列制造。这些集成阵列技术在非常大的区域设备中具有高产和低成本的潜力。

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