Nd:YAG laser machining with multilevel resist kinoforms

摘要

Laser micromachining with ten level resist kinoforms, manufactured by electron-beam lithography, is presented. The kinoforms were shown to have a diffraction efficiency of 68%. One kinoform was used to drill nine diffraction-limited holes simultaneously in a 0.10 mm thick stainless-steel plate. Marking in a silicon wafer was also done.