Fundamental mode SC-cut resonators with potential for oscillator and filter applications have been developed at 333 MHz, 500 MHz, and 1 GHz using chemical milling to form a ring-supported structure. A novel electrode configuration which eliminates registration problems is used. At 333 MHz, Q values are typically 30*10/sup 3/; the best Q obtained is 34.9*10/sup 3/. At 1 GHz, a Q value of 10.2*10/sup 3/ has been measured. Equivalent circuit parameters, frequency-temperature characteristics nonlinear resonance data, and acceleration sensitivity measurements are reported.
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