Self-sensing Nanometric Magnetoelectric Actuator Based on Metglas/PZT Composites

摘要

Nanometric actuators are widely required in precision machining, positioning and active optics. However, the accuracy of the actuators need to be guaranteed by closed-loop control. Therefore, develop a nanometric actuator with the selfsensing feature is a promising strategy. In this paper, a magnetoelectric actuator operating in magnetostrictive mechanism capable of piezoelectric self-sensing and remote operation under an applied magnetic field is developed. The magnetoelectric actuator is a Metglas/PZT disc composites. In order to predict the characteristics of this actuator, an equivalent circuit model based on equivalent elastic parameters for bending vibration of thin circular plate was developed. Moreover, the performance of the developed ME actuator is predicted using finite element method in COMSOL. The results not only validate the developed equivalent circuit model, but also demonstrate the nano-resolution and self-sensing capability of the proposed actuator.