The main conclusions are briefly summarized as follows: (1) Adopting a scroll structure, a quiet (55dB(A)), lightweight (735N (75kgf)) oil-free vacuum pump has been developed. (2) Beyond the specific issues treated here, we also succeeded in solving a variety of other problems stemming from the elimination of oil. For example, such problems as how to achieve a proper kinetic balance, how to select optimum running clearance, materials, structure, heat processing to ensure the longevity of the bearings, and how to ensure corrosion resistance to process gas and prevent deposition of process gas.
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