LOW-CARBON OIL-FREE VACUUM AIR PUMP UNIT WITH HIGH PUMPING SPEED

摘要

A low-carbon oil-free vacuum air pump unit with a high pumping speed comprises multiple vertical composite runoff molecular pumps, a cryogenic water vapor pump (19), and a chemisorption pump unit (14). A pumping speed comparable to that of a conventional diffusion pump is achieved. The vacuum air pump unit specifically comprises a vacuum chamber (11) separately connected to a rough pump unit (12), a vacuum housing (13), the chemisorption pump unit (14), a vent valve (15), and a vacuum gauge (16). A first vacuum valve (17) is disposed between the vacuum chamber (11) and the rough pump unit (12). A second vacuum valve (18) is disposed between the vacuum chamber (11) and the vacuum housing (13). The cryogenic water vapor pump (19) is disposed in an upper position inside the vacuum housing (13). A runoff pump unit (110) is disposed in a lower position inside the vacuum housing (13), and a vent port thereof is connected to a prior-stage pump (111) by a third vacuum valve (112). A fourth vacuum valve (113) is disposed between the vacuum chamber (11) and the chemisorption pump unit (14). The vacuum air pump unit reduces pumping energy consumption, shortens pumping time, and eliminates oil vapor pollution.