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Electron Beam Evaporation of Tungsten Oxide Films for Gas Sensors

机译:用于气体传感器氧化钨膜的电子束蒸发

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Pure and Iron incorporated nanostructured Tungsten Oxide (WO_3) thin films were investigated for gas sensing applications using noise spectroscopy. The WO_3 sensor was able to detect lower concentrations (1 ppm-10 ppm) of NH_3, CO, CH_4 and Acetaldehyde gases at higher operating temperatures between 100°C to 250°C. The response of the WO_3 sensor to NH_3, CH_4 and Acetaldehyde at lower temperatures (50°C-100°C) was significant when the sensor was photo-activated using blue-light emitting diode (Blue-LED). The WO_3 with Fe (WO_3:Fe) was found to show some response to Acetaldehyde gas only at relatively higher operating temperature (250°C) and gas concentration of 10 ppm.
机译:研究纯和铁掺入纳米结构氧化钨(WO_3)薄膜,用于使用噪声光谱法进行气体传感应用。 WO_3传感器能够在100℃至250℃之间的较高工作温度下检测NH_3,CO,CH_4和乙醛气体的较低浓度(1ppm-10ppm)的NH_3,CO,CH_4和乙醛气体。当使用蓝光发光二极管(蓝色LED)时,WO_3传感器在较低温度(50℃-100℃)下的响应在较低温度下(50℃-100℃)的响应显着。发现WO_3与Fe(WO_3:Fe)仅在相对较高的工作温度(250℃)和10ppm的气体浓度下仅对乙醛气体进行一些反应。

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