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Electron beam evaporation of tungsten oxide films for gas sensors

机译:用于气体传感器的氧化钨膜的电子束蒸发

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摘要

Pure and Iron incorporated nanostructured Tungsten Oxide (WO3) thin films were investigated for gas sensing applications using noise spectroscopy. The WO3 sensor was able to detect lower concentrations (1 ppm-10 ppm) of NH3, CO, CH4 and Acetaldehyde gases at operating temperatures between 100 degrees celcius to 250 degrees celcius. The iron doped Tungsten Oxide sensor (WO3:Fe) showed some response to Acetaldehyde gas at relatively higher operating temperature (250 degrees celcius) and gas concentration of 10 ppm. The sensitivity of the WO3 sensor towards NH3, CH4 and Acetaldehyde at lower operating temperatures (50 degrees celcius - 100 degrees celcius) was significant when the sensor was photo-activated using blue-light emitting diode (Blue-LED). From the results, photo-activated WO3 thin film that operates at room temperature appeared to be a promising gas sensor. The overall results indicated that the WO3 sensor exhibited reproducibility for the detection of various gases and the WO3:Fe indicated some response towards Acetaldehyde gas.
机译:使用噪声光谱技术研究了纯铁结合的纳米结构氧化钨(WO3)薄膜在气体传感应用中的应用。 WO3传感器能够在100摄氏度到250摄氏度之间的工作温度下检测到较低浓度的NH3,CO,CH4和乙醛气体(1 ppm-10 ppm)。铁掺杂的氧化钨传感器(WO3:Fe)在相对较高的工作温度(250摄氏度)和10 ppm的气体浓度下对乙醛气体表现出一定的响应。当使用蓝色发光二极管(Blue-LED)光激活WO3传感器时,在较低的工作温度(50摄氏度至100摄氏度)下,传感器对NH3,CH4和乙醛的灵敏度非常高。从结果来看,在室温下工作的光活化WO3薄膜似乎是一种有前途的气体传感器。总体结果表明,WO3传感器对各种气体的检测具有再现性,而WO3:Fe表明对乙醛气体有一定的响应。

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    Tesfamichael Tuquabo;

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  • 年度 2010
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