A Force-balanced Negative Feedback Method for MEMS Based Electrochemical Seismic Sensor

摘要

This paper presents a MEMS based electrochemical seismic sensor with force-balanced negative feedback where the bandwidth of the proposed device was extended from 7-20 Hz to 0.1-50 Hz. The quantified sensitivity of 3227 V/(m/s) was 161.4 times greater than the commercial moving-coil seismic sensor in the low frequency domain. The proposed seismic sensor may be widely used as a promising seismic detecting device in the field of seismology.