Mechanical Properties Analysis and Process Optimization for Tungsten-Rhenium Thin Film Thermocouples Sensor

摘要

The tungsten-rhenium thin film thermocouples (TFTCs) sensor is designed and optimized based on mechanical properties analysis, the process is optimal designed and the experiment shows the working hours of TFTCs sensor with optimal increasing from 10 minutes to 300 minutes at 900K, and the total work time reach to 600 minutes with a better output voltage when compared with our previously published work and the typically type-S wire thermocouple. Nano-indentation and numerical analysis was used to get the mechanical properties of tungsten-rhenium thin film to make the optimal designed for the dimension parameter of TFTCs. Heat treatment was used to improve the film quality, and the post-processing module was designed to compensate the cold junction temperature and record data. Static thermal test was done to confirm the performance of TFTCs.