Heat flux evaluation of the atmospheric pressure microwave line plasma from spatio-temporal temperature measurement of the slot-plate

摘要

Atmospheric pressure (AP) plasma is attracting increasing attention because it is free from vacuum chambers and has many possible industrial applications. Among numerous AP plasma sources developed so far, AP microwave plasma generated in slots on waveguides has the appeal of low gas temperature and high plasma density [1]. Previously, our group has successfully produced a meter-scale AP microwave plasma source utilizing travelling wave and has reported the existence of energy flow within the waveguide slot along the z-direction [2]. In this study, we further investigate energy flow of the slot-type AP microwave plasma, by analyzing the temperature rise-up of the slot-plate due to the heat flux from the plasma. In addition, the result is discussed by a simple analytical model.