Static and dynamic measurements of active MEMS by Twyman-Green interferometry: case of AlN-based microactuators

摘要

This study presents static and dynamic characterisation by Twyman Green interferometry of two active MEMS actuators driven by a thin film transducer of aluminium nitride (AlN). Firstly, we report on the testing results of thin film AlN/Si piezoelectric micro-machined ultrasonic transducers. These devices are expected to exhibit sensing capabilities for monitoring fluid property changes. The goal of second case study is the development of reliable AlN driven cantilevers working as actuation elements in Micro-Electro-Mechanical Systems (MEMS).