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Chromatic confocal phase stepping interferometer

机译:彩色共焦阶段步进干涉仪

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The idea which initiated this work is to adapt the principle of phase coding to a Confocal Chromatic type sensor in order to enhance the dynamic range and the axial resolution of height measuring systems. When using a classical Confocal chromatic type measurement, we obtain a "coarse" value of the distance. Then by the means of a spectrally adjustable light source and a chromatic objective, we choose the wave length in order to focus in the plane of the object. Next, by measuring the phase coding, we can precisely define the profile of the object. So, in the end, we obtain the subnanometric preciseness of the phase coding while clearing up the ambiguity that is inherent to interferometric methods thanks to the confocal chromatic measurement. The initial idea is to use a Linnik interferometer, with a dedicated chromatic objective in the object arm, and an achromatic objective in the reference arm. A change of the wave length leads to a variation of the focus plane in relation to the object. This equivalence between a variation in wave length and a variation in distance, caused by the axial chromatism, leads us to imagine a system of phase coding in which the usual movement of the reference mirror is replaced by a variation of the wave length. We then obtain an interferometer without any moving part, which produces the extensive depth of field that is peculiar to chromatic systems.
机译:启动这项工作的想法是使相位编码的原理调整到共聚焦色谱传感器,以增强动态范围和高度测量系统的轴向分辨率。使用经典的共焦色型测量时,我们获得距离的“粗糙”值。然后,通过光谱可调光源和色彩目标,我们选择波长以便聚焦在物体的平面中。接下来,通过测量相位编码,我们可以精确定义对象的轮廓。因此,最终,我们获得了相位编码的亚域确切,同时清除了与共聚焦色度测量有关干涉测量方法所固有的模糊性。初始思想是使用Linnik干涉仪,在对象臂中具有专用的色彩目标,以及参考臂中的消色差目标。波长的变化导致对象相对于对象的焦平面的变化。由轴向扫描引起的波长和距离变化之间的该等价导致我们想象一下,其中参考镜的通常运动由波长的变化代替。然后,我们在没有任何移动部分的情况下获得干涉仪,其产生了鲜明的截面的景深。

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