DEVELOPMENT OF LARGE AREA NANOSTRUCTRED AR COATINGS FOR EO/IR SENSOR APPLICATIONS

摘要

Electro-optical/infrared nanosensors are being developed for a variety of defense and commercial systems applications. One of the critical technologies that will enhance EO/IR sensor performance is the development of advanced antireflection coatings with both broadband and omnidirectional characteristics. In this paper, we review our latest work on high quality nanostructure-based antireflection structures, including recent efforts to deposit nanostructured antireflection coatings on large area substrates. Nanostructured antireflection coatings fabricated via oblique angle deposition are shown to enhance the optical transmission through transparent windows by minimizing broadband reflection losses to less than one percent, a substantial improvement over conventional thin-film antireflection coating technologies. Step-graded antireflection structures also exhibit excellent omnidirectional performance, and have recently been demonstrated on 6-inch diameter substrates.