Optical Properties of Cobalt Oxide Thin Films

摘要

Thin cobalt oxide films with different optical and electrical properties were obtained by the method of RF magnetron sputtering by changing the sputtering modes. The analysis of the influence of the sputtering mode on the structure of the deposited films is carried out. The type of optical transitions was established from the performed optical studies of thin films cobalt oxide. The value of the optical band gap of the obtained films is determined and their phase composition is established. The electrical resistance and thickness of the obtained films were determined.