Tunable VCSEL with integrated heater and planar waveguidewavelength monitor

摘要

A compact solution for tuning and monitoring the emissionwaveguide of a single mode VCSEL (λ=760 nm) at constant outputpower is presented. The key element within the micro system is a chirpedgrating waveguide coupler combined with a diffractive collimating lensand a two-segment detector. The resulting wavelength measurementresolution of the chip is in the range of 0.06 nm