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Finite element analysis of a microelectrode on a substrate

机译:基板上微电极的有限元分析

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摘要

Analytical solutions for the voltage field generated by a microelectrode are available for simple electrode and volume conductor geometries. However, the practical microelectrodes fabricated on a planar substrate deviate from those simple geometries substantially. It needs to be determined in which cases the analytical methods can be employed without introducing significant errors. We developed a finite element model (FEM) to study the potential field generated in a volume conductor by a circular disk electrode etched into a planar substrate. The results were compared to that of an analytical model provided by Wiley and Webster. The peak voltage at the contact surface varies as a function of the substrate width and it reaches 90% of the maximum at about twice the contact diameter. This suggests that an FEM is required for narrow substrate widths. The effect of the intercontact distance for the bipolar electrodes is also studied.
机译:微电极产生的电压场的解析解决方案可用于简单的电极和体积导体几何形状。然而,在平面基板上制造的实际微电极实质上偏离了那些简单的几何形状。需要确定在什么情况下可以采用分析方法而不会引起重大错误。我们开发了一个有限元模型(FEM),以研究通过蚀刻到平面基板中的圆盘电极在体积导体中产生的电势场。将结果与Wiley和Webster提供的分析模型进行了比较。接触表面的峰值电压随衬底宽度的变化而变化,在接触直径的两倍时达到峰值的90%。这表明对于窄的基板宽度需要FEM。还研究了双极电极的接触距离的影响。

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