The design, technology and basic characteristics of the LTCC conductivity detector are presented. The finite element analysis (Ansys program) was applied to calculate the influence of the detector and electrodes geometry on the electrical properties. The electric potential and current density distributions inside the detector channel were analysed. The detector design was carried out on the base of ANSYS simulation. The detector was fabricated in typical LTCC process. YAG laser system was used for electrode fine line patterning and shaping the channels. The detector was tested by measurements of KCl solution with various concentration.
展开▼
